Motional Mode based Positioning of Micro-Moving Stage with Acceleration Feedback.
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEJ Transactions on Industry Applications
سال: 1994
ISSN: 0913-6339,1348-8163
DOI: 10.1541/ieejias.114.1057